A strategic approach to performing QC/QA on purified gas should include the capability to detect early break through components immediately following each UHP gas purifier.
A strategic approach to performing QC/QA on purified gas should include the capability to detect early break through components immediately following each UHP gas purifier. Comparing the removal capacity for individual impurities, it is clear that nearly all UHP gas purifiers are optimized to remove moisture and oxygen from process gases. Since purifiers have a much lower affinity for internally generated impurities such as hydrogen, carbon monoxide, carbon dioxide and methane, the ta7000 is ideal for purifier monitoring.
The ta7000 Gas Purity Monitor can also be stationed far downstream from the purifier to maintain confidence in the gas quality at a critical point in the gas distribution system. Installed as a safeguard to monitor for several gas impurities simultaneously, the ta7000 can sense changes that result from a variety of system break down scenarios, such as outgassing from flow components, manifold crossovers or back streaming from a production tool.
Trace Analytical Inc., 3517a Edison Way, Menlo Park, CA 94025. Tel: 650-364-6895; Fax: 650-364-6897.