EnChem is a proprietary polymer process enabling selective filtration of both dissolved and suspended contaminants for semiconductor manufacturers using chemical mechanical planarization (CMP), fluorinated chemistries or copper interconnects.
EnChem is engineered to treat CMP wastewater streams to remove H.F., silica, copper, tungsten, alumina and silicon materials. It can treat the combined waste streams of electroplating solutions, wafer rinse water and CMP slurry in a single process.
Microbar Incorporated, 1252 Orleans Dr., Sunnyvale, CA 94089-1137. Tel: 408-541-1040; Fax: 408-541-1441.