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Copper CMP/CMP Wastewater Treatment With Water Recycling
By Evoqua Water Technologies

Evoqua Water Technologies was approached by a semiconductor tool manufacturer based in Silicon Valley to assist in the design of an automated CMP and copper CMP waste treatment system. After careful economic evaluations, it became clear that the largest cost of ownership of the treatment system was the removal of the hazardous waste sludge from a classical two stage precipitation/clarification system. Any method of precipitation produces copper sludge which would be required to be handled as a hazardous waste in the state of California.

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SOLVAir Select 200 trona For Removal Of HCl, SO2 and SO3

SOLVAir Select 200 trona (a natural form of sodium sesquicarbonate) offers a high-assay, low-cost alternative to acid neutralization.

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